Method and structure of making enhanced UTBB FDSOI devices

ABSTRACT

An integrated circuit die includes a substrate having a first layer of semiconductor material, a layer of dielectric material on the first layer of semiconductor material, and a second layer of semiconductor material on the layer of dielectric material. An extended channel region of a transistor is positioned in the second layer of semiconductor material, interacting with a top surface, side surfaces, and potentially portions of a bottom surface of the second layer of semiconductor material. A gate dielectric is positioned on a top surface and on the exposed side surface of the second layer of semiconductor material. A gate electrode is positioned on the top surface and the exposed side surface of the second layer of semiconductor material.

BACKGROUND

Technical Field

The present disclosure relates to the field of integrated circuittechnology. The present disclosure relates more particularly totransistors formed in integrated circuit dies.

Description of the Related Art

The transistor is a fundamental component of many integrated circuits. Asingle integrated circuit die can include billions of transistors formedin a semiconductor substrate. In order to decrease the cost and increasethe complexity of integrated circuits, integrated circuit technology iscontinually scaling downward. In particular, the dimensions of thetransistors are decreased in order to fit more transistors in a givenarea of a semiconductor substrate.

Ultra Thin Body and Box (UTBB) Fully Depleted Silicon On Insulator(FDSOI) technology provides many benefits to transistor functionality.These benefits can include adding the ability to adjust the thresholdvoltage V_(th) of a transistor and improving electrostatics in thechannel region by back biasing the channel region via application of avoltage to a bulk layer of semiconductor material separated from thechannel region by a dielectric layer.

FIGS. 1A-1C illustrate an integrated circuit die 100 including atransistor 101 implementing UTBB FDSOI technology. FIGS. 1A, 1B arecross-sections of the transistor 101 in the integrated circuit die 100,while FIG. 1C is a top view of the transistor in the integrated circuitdie.

With reference to FIG. 1A, the integrated circuit die 100 includes thetransistor 101 formed on an FDSOI substrate 102. The FDSOI substrate 102includes a first layer of semiconductor material 104, a buried oxidelayer (BOX) 106, and a second layer of semiconductor material 108. Araised source region 110 and a raised drain region 112 extend from thesecond layer of semiconductor material 108. A gate structure 114overlies a channel region 116 positioned in the second layer ofsemiconductor material 108. The gate structure 114 includes a gatedielectric 118 positioned directly over the channel region 116 of thetransistor 101, a metal gate positioned on the gate dielectric 118. Themetal gate includes a conductive liner 120 and a gate electrode 122positioned on the gate dielectric. Sidewall spacers 124 are positionedbetween the raised source and drain regions 110, 112 and the gatedielectric 118. A dielectric cap 126 is positioned on the gate electrode122. A shallow trench isolation region 128 is formed in the substrate102 on each side of the second layer of semiconductor material 108.

The cross-sectional view of FIG. 1B shows many of the same layers andstructures as shown in FIG. 1A, but from a view perpendicular to theview shown in FIG. 1A as can be more clearly understood with referenceto the cross section lines 1A, 1B indicated in FIG. 1C. In particular,the cross-section of FIG. 1B does not pass through the source and drainregions 110, 112 of the transistor 101. Thus, the raised source anddrain regions 110, 112 are not apparent in FIG. 1B. FIG. 1B illustratesthat the sidewall spacers 124 are positioned over the trench isolation128 at either end of the gate structure 114.

The transistor 101 allows a drain current I_(D) to flow from the drain112 to the source 110 through the channel region 116 in the second layerof semiconductor material 108 below the gate dielectric 118. The draincurrent I_(D) can be controlled by applying a voltage to the gateelectrode 122. In CMOS applications, the transistor 101 is typicallyused as a simple switch having an on mode and an off mode. When thetransistor 101 is off, the drain current I_(D) is substantially zero.When the transistor 101 is on, the transistor operates in saturationmode and the drain current I_(D) flows between the drain region 112 andthe source region 110. The magnitude of the drain current I_(D) isapproximated by the following formula:

$I_{D} = {{\mu_{n}( \frac{C_{ox}}{2} )}( \frac{W}{L} ){( {V_{gs} - V_{th}} )^{2}.}}$

As can be seen from the expression above, the drain current I_(D)depends on many factors, including the carrier mobility (μ_(n) forn-channel devices, μ_(p) for p-channel devices), the gate oxidecapacitance C_(ox), the ratio of the channel width W to the channellength L, the threshold voltage V_(th) of the transistor, and the gateto source voltage V_(gs). Thus, a selected value for the drain currentI_(D) can be achieved by selecting particular values for V_(gs), thewidth to length ratio W/L, the carrier mobility μ_(n), and the gateoxide capacitance C_(ox).

In some applications, it is beneficial to have a relatively high currentfootprint, i.e., a high amount of current per surface area of asemiconductor substrate. However, as integrated circuit technologycontinues to scale downward, there are difficulties involved withmaintaining a high current density while scaling down the dimensions ofthe transistors. For example, as the dimensions of the transistorscontinue to scale downward, the supply voltages available to theintegrated circuit die typically decrease as well in order to reducepower consumption and to not damage the transistors.

As can be seen from the drain current equation above, one way toincrease the drain current ID is to increase the channel width W and/orto decrease the channel length L. As seen in FIGS. 1B and 1C, the widthW of the channel 116 corresponds to the portion of the gate structure114 that is directly over the second layer of semiconductor material 108between trench isolation regions 128. The length L of the channel region116 corresponds to the length of the gate electrode 122 directly abovethe second layer of semiconductor material 108 between the source anddrain regions 110, 112.

The extent to which the channel width L can be decreased is limited inpart by restraints associated with photolithography techniques.Likewise, simply increasing the width W of the channel 116 in aconventional manner by extending the gate structure 114 reduces thenumber of transistor that can be formed in a given area of asemiconductor substrate. Thus, increasing the width to length ratio W/Lin a planar transistor can be difficult.

BRIEF SUMMARY

One embodiment is an integrated circuit die including a transistorhaving an increased channel width with respect to some conventionalplanar transistors. A gate dielectric and a gate electrode of thetransistor are positioned not only above a semiconductor substrate inwhich a channel region of the transistor is positioned, but on exposedsidewalls of the semiconductor substrate, thereby increasing the widthof the channel region by a thickness of the semiconductor substrate.

In one embodiment, the integrated circuit die includes a silicon oninsulator substrate having a first layer of semiconductor material, afirst layer of dielectric material positioned directly on the firstlayer of semiconductor material, and a second layer of semiconductormaterial positioned directly on the first layer of dielectric material.The channel region of the transistor is positioned in the second layerof semiconductor material. The gate dielectric is positioned directly ona top surface and on a sidewall of the second layer of semiconductormaterial. The gate electrode is positioned directly on the gatedielectric on the top surface and on the sidewall of the second layer ofsemiconductor material.

In one embodiment, the gate dielectric and the gate electrode arepositioned on an exposed portion of a bottom surface of the second layerof semiconductor material. This further increases the channel width bythe width of the exposed portion of the bottom surface of the secondlayer of semiconductor material.

One embodiment is directed to a method of forming a transistor having anincreased channel width with respect to some conventional planartransistors. The method includes exposing a sidewall of a first layer ofsemiconductor material by etching a trench isolation region in the firstlayer of semiconductor material. The method further includes forming agate dielectric directly on the exposed sidewall and on a top surface ofthe first layer of semiconductor material and forming a gate electrodedirectly on the gate dielectric on the sidewall and on the top surfaceof the first layer of semiconductor material.

In one embodiment, the first layer of semiconductor material ispositioned directly on a first layer of dielectric material. The firstlayer of dielectric material is positioned directly on a second layer ofsemiconductor material. The method can include exposing a portion of abottom surface of the first layer of semiconductor material by etching aportion of the first layer of dielectric material, forming the gatedielectric directly on the exposed portion of the bottom surface of thefirst layer of semiconductor material, and forming the gate electrodedirectly on the gate dielectric on the exposed portion of the bottomsurface of the first layer of semiconductor material.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIGS. 1A-1C illustrate views of a known integrated circuit die.

FIGS. 2A-2C illustrate views of an integrated circuit die including atransistor, according to one embodiment.

FIGS. 2D-2Y illustrate views of an integrated circuit die including atransistor at various stages of processing, according to one embodiment.

FIGS. 3A-3G illustrate views of an integrated circuit die including atransistor at various stages of processing, according to one embodiment.

DETAILED DESCRIPTION

FIGS. 2A-2C illustrate an integrated circuit die 200 including atransistor 201 having an increased channel width W (a combination of W₁,W₂, W₃) as compared to the conventional transistor 101 of FIGS. 1A-1C.FIG. 2A is a cross-sectional view of the integrated circuit die 200.FIG. 2B is a cross-sectional view of the integrated circuit die 200.FIG. 2C is a top view of the integrated circuit die 200 of FIGS. 2A, 2B.

The integrated circuit die 200 of FIG. 2A includes a substrate 202,which may be a Ultra Thin Body and Box (UTBB) Fully Depleted Silicon OnInsulator (FDSOI) substrate. The substrate 202 includes a first layer ofsemiconductor material 204, a buried oxide (BOX) layer 206 positioned onthe first layer of semiconductor material 204, and a second layer ofsemiconductor material 208 positioned on the BOX layer 206. A portion ofthe BOX layer 206 has been removed below the second layer ofsemiconductor material 208. A gate dielectric 218 is positioned on thesecond layer of semiconductor material 208, on exposed sides 205 of theBOX layer 206, on a top surface 207 of the BOX layer 206 and alongsidewalls 224. A gate electrode includes a liner 220 positioned on thegate oxide 218 and conductive material 222 is positioned on the liner220. Sidewall spacers 224 are positioned adjacent to vertical portions219 of the gate dielectric 218. A dielectric cap 226 is positioned onthe conductive material 222, on the liner 220, and on the gatedielectric 218. A channel region 216 of the transistor 201 correspondsto the portions of the second layer of semiconductor material 208 incontact with the gate dielectric 218. Trench isolation regions 228 areformed in the first layer of semiconductor material 204 and lined with aprotective dielectric liner 230. An oxide layer 245 is positionedbetween the shallow trench isolation 228 and the sidewalls 224.

With reference to FIG. 2B, the integrated circuit die 200 includes araised source region 210 and a raised drain region 212 that extendvertically from the second layer of semiconductor material 208. Thesidewall spacers 224 are positioned between the raised source and drainregions 210, 212 and the conductive material 222. For simplicity, thegate, source, and drain contacts, as well as inter-metal dielectriclayers, are not shown in FIGS. 2A-2C.

The transistor 201 has three terminals: the source 210, the drain 212,and the conductive material 222, i.e. a gate electrode. By applyingselected voltages to the source 210, the drain 212, and the gateelectrode, a drain current I_(D) will flow from the drain 212 to thesource 210 through the channel region 216.

In CMOS applications, the transistor 201 acts as a switch that can beturned on or off. When the transistor 201 is on, the drain current I_(D)flows from the drain 212 to the source 210. When the transistor 201 isoff, the drain current I_(D) does not flow. In saturation mode, thedrain current I_(D) can be approximated by the following expression:

$I_{D} = {{\mu_{n}( \frac{C_{ox}}{2} )}( \frac{W}{L} ){( {V_{gs} - V_{th}} )^{2}.}}$

As can be seen from the expression above, the drain current I_(D) isproportional to the channel width W. Thus, one way to increase the draincurrent I_(D) is to increase the channel width W.

The transistor 201 has an increased effective channel width W incomparison to the transistor 101 of FIGS. 1A-1C. With reference to FIG.2A, the effective width of the channel 216 corresponds to the portion ofthe surface of the second layer of semiconductor material 208 that is indirect contact with the gate dielectric 218. Because the second layer ofsemiconductor material 208 and the BOX layer 206 have been etched toexpose sidewalls 221 and portions of a bottom surface 223 of the secondlayer of semiconductor material 208, the gate dielectric 218 is not onlypositioned on a top surface of the second layer of semiconductormaterial 208, but on the sidewalls 221 and the exposed portions of thebottom surface 223 of the second layer of semiconductor material 208.The liner 220 is positioned on the gate dielectric 218 on the topsurface, exposed sidewalls, and exposed portions of the bottom surfaceof the second layer of semiconductor material 208. Thus, when a voltageis applied between the conductive material 222 and the source 210 (inaddition to applying a voltage between the source 210 and drain 212) toturn the transistor 201 on, channel inversion occurs along all of thesurface of the second layer of semiconductor material 208 that isadjacent to the gate dielectric 218. The effective width W of thechannel 216 therefore includes the width W₁ of the top surface of thesecond layer of semiconductor material 208, the width W₂ of the exposedsidewalls of the second layer of semiconductor material 208, and thewidth W₃ of the exposed portions of the bottom surface of the secondlayer of semiconductor material 208. The total effective channel width Wcan be approximated by the following expression:W=W ₁+2W ₂+2W ₃.

The effective channel width W of the transistor 201 can be up to 50%greater than the channel width W of the transistor 101. Thus, the draincurrent I_(D) can be up to 50% greater than the drain current I_(D) ofthe transistor 101 while consuming the same area of semiconductorsubstrate as the transistor 101. The current footprint of the transistor201 is, therefore, increased with respect to the current footprint ofthe transistor 101 of FIGS. 1A-1C.

The materials, dimensions, and processes for forming the transistor 201will be described in greater detail below with respect to FIGS. 2D-2Y.

FIG. 2D illustrates the integrated circuit die 200 at an intermediatestage of processing. The integrated circuit die 200 includes thesubstrate 202, which may be an FDSOI substrate according to oneembodiment. The substrate 202 includes the first layer of semiconductormaterial 204, the BOX layer 206 directly on top of the first layer ofsemiconductor material 204, and the second layer of semiconductormaterial 208 directly on top of the BOX layer 206.

In one embodiment, the first layer of semiconductor material 204 ismonocrystalline silicon between 10 and 30 nm thick. The BOX layer 206 issilicon dioxide between 10 and 25 nm thick. The second layer ofsemiconductor material 208 is monocrystalline silicon between 5 and 8 nmthick. Alternatively, other semiconductor materials and dielectricmaterials can be used for the first and second layers of semiconductormaterial 204, 208 and the BOX layer 206.

Because the second layer of semiconductor material 208 is particularlythin, a depletion region at junctions between the source/channel 210,216 and the drain/channel 212, 216 extends fully between top and bottomsurfaces of the second layer semiconductor material 208. For this reasonthe substrate 202 is a fully depleted SOI substrate. Nevertheless, whilethe embodiments shown and discussed with respect to FIGS. 2A-2Y aredescribed as including an FDSIO substrate 202, partially depleted SOIsubstrates, or entirely different semiconductor substrates can be usedin accordance with principles of the present disclosure as will beunderstood by those of skill in the art in light of the presentdisclosure.

In FIG. 2E, a pad oxide layer 232 is formed on the second layer ofsemiconductor material 208. The pad oxide layer 232 can be formed byheating the integrated circuit die 200 while the second layer ofsemiconductor material 208 is exposed to oxygen. The pad oxide layer 232can be between 1 and 3 nm thick.

A layer of silicon nitride 234 is then formed on the pad oxide layer232. The silicon nitride is, for example, formed by chemical vapordeposition (CVD), plasma enhanced chemical vapor deposition (PECVD), orother suitable processes for forming a layer of silicon nitride on in anintegrated circuit die.

In FIG. 2F, trenches 236 are etched in the integrated circuit die 200.In particular, the integrated circuit die 200 is masked and etched usingknown photolithography techniques.

In one embodiment, the trenches 236 are formed in multiple etch steps.For example, a first etch can be performed to etch the silicon nitridelayer 234, a second etch can etch the pad oxide 232, and a third etchcan etch the second layer of semiconductor material 208, and a fourthetch can etch the BOX layer 206. The silicon nitride layer 234 can beetched using hot phosphoric acid. The pat oxide 232 and the BOX layer206 can be etched using hydrofluoric acid (HF). The second layer ofsemiconductor material 208 can be etched using potassium hydroxide, KOH.The final etch in FIG. 2F stops before etching completely through theBOX layer 206. This can be accomplished by using a timed etch whenetching the BOX layer 206.

In FIG. 2G, silicon nitride spacers 238 are formed on the sides of thetrenches 236. The silicon nitride spacers 238 protect the BOX layer 206in subsequent steps as will be explained in more detail below. Thesilicon nitride spacers 238 can be formed by chemical vapor depositionor by any other suitable method for forming a layer of silicon nitride.

In FIG. 2H, the exposed portions of the BOX layer 206 are etched andremoved, exposing the first layer of semiconductor material 204. Thesilicon nitride layers 234, 238 can act as a hard mask for this etchstep. Subsequently, a portion of the first layer of semiconductormaterial 204 is etched via an etch, such as an anisotropic etch, againwith the silicon nitride layers 234, 238 acting as a hard mask.

A lateral etch of the first layer of semiconductor material 204 is thencarried out to form recesses 240 in the first layer of semiconductormaterial 204. The lateral etch can be performed by epitaxially growingsilicon germanium on the first layer of semiconductor material 204. Whensilicon germanium is epitaxially grown from a silicon substrate, silicongermanium will consume some of the silicon substrate. In other words,rather than merely adding silicon germanium to the surface of thesilicon substrate, some of the silicon substrate is consumed and becomessilicon germanium. In the case of FIG. 2H, the silicon germanium willconsume some of the first layer of semiconductor material 204 below theBOX layer 206. Subsequently, the silicon germanium can be selectivelyetched with respect to the pure silicon of the first layer ofsemiconductor material 204, thereby leaving recesses 240 below the BOXlayer 206. The silicon germanium can be selectively etched using HCl oran SC1 etching process. In an alternative embodiment, the silicongermanium can be deposited by CVD and accompanied by a thermal drive ininstead of epitaxially growing the silicon germanium.

In FIG. 2I, a dielectric liner 230 is formed on the exposed portions ofthe integrated circuit die 200. In one example, the dielectric liner 230is silicon nitride. Alternatively, the dielectric liner 230 can be HfO2,HfSiOx, AlOx, or another material that is highly resistant to beingetched by HF. Silicon dioxide is then deposited on the dielectric liner230 in order to form shallow trench isolation regions (STI) 228. Thesilicon dioxide can be deposited by CVD, PECVD, or any other suitableprocess.

In FIG. 2J, the STI 228 is etched back to the BOX layer 206 with an HFetch. The dielectric liner 230 and the silicon nitride layer 234 can actas a hard mask when etching back the STI 228. After the STI has beenetched back, the exposed portion of the dielectric liner 230 is etchedback to the position shown in FIG. 2J. The silicon nitride spacers 238are also removed. The dielectric liner layers 230 and the siliconnitride spacers 238 can be removed in a single etch step with no maskapplied. Because the silicon nitride layer 234 is much thicker than thedielectric liner 230 and the silicon nitride spacers 238, only a smallportion of the silicon nitride layer 234 is removed.

The shallow trench isolation region 228 is then refilled by depositingsilicon dioxide. The silicon dioxide can be deposited by CVD or by anyother suitable process as described previously. After the shallow trenchisolation region 228 is refilled with silicon dioxide, a chemicalmechanical planarization process is performed on the top of theintegrated circuit die 200 to level the silicon nitride layer 234 andthe silicon dioxide of the shallow trench isolation region 228.

In FIG. 2K, the silicon nitride layer 234 is etched and removed. Thesilicon nitride layer 234 can be removed without a mask by using anetchant that selectively etches silicon nitride with respect to silicondioxide as described previously.

In FIG. 2L, the integrated circuit die 200 is subjected to a strong HFwet etch. The strong wet etch completely removes the pad oxide 232 andetches the shallow trench isolation 228 back to the dielectric liner230. The BOX layer 206 is also etched by the high concentration of HF,leaving recesses 244 and the BOX layer 206 beneath the second layer ofsemiconductor material 208. The recesses 244 are, for example, between 5and 10 nm. This exposes the top surface 225, the side surfaces 221, andthe bottom surface 223 of the second semiconductor layer 208.

In FIG. 2M, the thin dummy gate oxide 245 is formed on the exposedportions of the integrated circuit die 200. A polysilicon dummy gate 246is then formed on the dummy gate oxide 245. A silicon nitride hard mask248 is then deposited on the polysilicon 246. The dummy gate oxide 245and the polysilicon dummy gate 246 fill the recesses 244 in the BOXlayer 206. In one embodiment, the dummy gate oxide 245, the polysilicondummy gate 246, and the silicon nitride hard mask 248 are formed as partof a replacement metal gate process, as will be explained in more detailbelow. In an alternative embodiment, amorphous silicon can be usedinstead of polysilicon for the layer 246.

FIG. 2N is a top view of the integrated circuit die 200 according to oneembodiment. In FIG. 2N, the hard mask 248, the dummy gate 246, and thedummy gate oxide 245 have been photolithographically masked and etchedwith a reactive ion etch (RIE) leaving only a strip of the dummy oxide245. The remaining polysilicon dummy gate 246 and hard mask 248 are in aposition that will become the gate structure 214 of the transistor 201as described in more detail below. In order to ensure that nopolysilicon 246 is left in the recesses 244, an isotropic etch isperformed to remove the polysilicon from the recesses 244.

FIG. 2O is a cross-section of the integrated circuit die 200 of FIG. 2Ntaken along cross-section lines 2O as seen in FIG. 2N. FIG. 2P is across-section of the integrated circuit die 200 of FIG. 2N taken alongcross-section lines 2P as seen in FIG. 2N.

FIG. 2Q is a top view of the integrated circuit die 200 after siliconnitride sidewall spacers 224 have been formed around the dummy gatestructure including the dummy gate oxide 245, the dummy polysilicon 246,and the hard mask 248. After formation of the sidewall spacers 224, anepitaxial growth process is performed on the second layer ofsemiconductor material 208 in order to form raised source and drainregions 210, 212 as seen in FIG. 2R. In the epitaxial growth, siliconaccumulates on the second layer of semiconductor material in such amanner that the accumulation is of a monocrystalline structure with thesecond layer of semiconductor material 208. Dopant ions are thenimplanted into the epitaxially grown source and drain regions 210, 212according to known processes. As can be seen from the cross-section ofFIG. 2R, the silicon nitride sidewall spacers also formed in the exposedportions of the recesses 244. The silicon nitride sidewall spacers 224do not form in the portions of the recesses 244 still filled withpolysilicon 246 as seen in FIG. 2S.

Dopant ions are deposited in the raised source and drain regions 210,212. The type of dopant ions, N or P, is selected based on whether thetransistor 201 is an N-channel or a P-channel device in accordance withwell understood principles of integrated circuit design. Though notshown in the Figures, a layer of silicide can also be formed on thesource and drain regions 210, 212.

FIGS. 2T-2V are views of the integrated circuit die 200 after aninter-level dielectric layer 260 has been formed on the integratedcircuit die 200, and after the dummy gate oxide 245, the dummypolysilicon gate 246, and the hard mask 248 have been removed. In oneembodiment, the inter-level dielectric layer 260 is silicon dioxide.Alternatively, the inter-level dielectric layer 260 can be a low Kdielectric, aerogel, or a combination of layers of dielectric materials.

FIG. 2T is a top view of the integrated circuit die 200 showing theinter-level dielectric layer 260 and the exposed portion of the secondlayer of semiconductor material 208 from which the dummy gate oxide 245,the dummy polysilicon gate 246, and the hard mask 248 have been removed.A top surface of the sidewalls 24 may be visible in this top down view.This feature in the top down view was omitted for simplicity.

FIG. 2U is a cross-section of the integrated circuit die 200 taken alongcross-section lines 2U as shown in FIG. 2T. FIG. 2U illustrates that thedummy gate oxide 245 and the dummy polysilicon gate 246 have beenremoved from the recesses 244 while the sidewall spacers 224 stillremain.

FIG. 2V is a cross-section of the integrated circuit die 200 taken alongcross-section lines 2V as shown in FIG. 2T. FIG. 2T illustrates that thesidewall spacers 224 are still in the recesses 244 in those regions ofthe integrated circuit die 200 which do not correspond to the gateregion of the transistor 201. The inter-level dielectric layer 260covers the raised source and drain regions 210, 212.

FIGS. 2W-2Y are views of the integrated circuit die after the high Kgate dielectric 218, the liner 220, and the conductive material 222 havebeen deposited in those areas where the dummy gate oxide 245 and thedummy polysilicon gate 246 were previously removed. Additionally, thesilicon nitride cap 226 has been formed on the gate structure 214, andconductive plugs 262, 264 have been formed in the inter-level dielectriclayer 260.

FIG. 2W is a top view of the integrated circuit die 200. The top view ofFIG. 2W illustrates the positions of the contact plugs 262, 264 inrelation to the gate structure 214. Only the silicon nitride cap layer226 is visible on the gate structure 214 in the top view of FIG. 2W.

FIG. 2X is a cross-section of the integrated circuit die 200 of FIG. 2Wtaken along cross-section lines 2X as seen in FIG. 2W. The high K gatedielectric 218 is positioned directly on the second layer ofsemiconductor material 208. The channel region 216 is located in thesecond layer of semiconductor material 208 directly below the gatedielectric 218. The length L of the channel 216 corresponds to theportion of the second layer of semiconductor material 208 in directcontact with the gate dielectric 218. The gate structure 214 furtherincludes the liner 220 in direct contact with the gate dielectric 218.

In one embodiment, the gate dielectric 218 is a high K gate dielectrichaving a thickness between 1 and 2 nm. The gate dielectric 218 caninclude one or more of hafnium, zirconium, oxides of hafnium orzirconium, or other suitable materials for a high K gate dielectric. Thegate dielectric can be deposited by CVD, physical vapor deposition(PVD), or any other suitable process for forming a high K gatedielectric. The thickness of the gate dielectric 218 can be selected toachieve a particular value of the threshold voltage V_(th) of thetransistor 201.

In one embodiment, the liner 220 includes one or more of gold, copper,titanium, tungsten, tantalum, or nitrides of those materials. The liner220 can be deposited by CVD or PVD. The space between portions of theliner 220 is filled with a conductive material 222. In one embodiment,the conductive material 222 is tungsten.

The conductive plugs 262, 264 are formed by etching vias in theinterlevel dielectric material 260 and then filling the vias with aconductive material. In one embodiment, the conductive plugs 262, 264are made from tungsten. Alternatively, other suitable conductivematerials can be selected for the plugs 262, 264.

One benefit of the transistor 201 is relaxed alignment constraints forthe contact plugs 262, 264. This results from the recess 240 in thefirst layer of semiconductor material 204 and the outgrowth of theepitaxial layer of semiconductor material from the sidewall of thesecond layer of semiconductor material 208. The contact plugs 262, 264can be further from the sidewall spacers 224 without the risk ofshorting to the first layer of semiconductor material 204 due to apossible over etch of the BOX 208.

FIG. 2Y is a cross-section of the integrated circuit die 200 of FIG. 2Wtaken along cross-section lines 2Y. FIG. 2Y illustrates the increase inthe channel width W of the transistor 201 such as in comparison with thechannel width of the transistor 101 of FIGS. 1A-1C. In particular, theoverall width W is a combination of W₁, W₂, and W₃. The width W₂ may beconsidered a height of the channel region. The width W₁ is significantlygreater than the width W₂, i.e. the height. This is in contrast to a finof a fin-fet structure, which has a height that is much greater than awidth. In one embodiment, the width W₁ of the present disclosure is inthe range of 40 and 400 nanometers and the width W₂ (height) is in therange of 4 and 12 nanometers. This gives a ratio of W₁ to W₂(width:height) in the range of 10:1 and 100:3. This is in contrast todimensions of a fin, which may have the height in the range of 35 and 50nanometers and a width in the range of 6 and 12 nanometers (whichcorresponds to a ratio of the width to height in the range of 6:35 and6:25). In one example, the width W₁ is about 100 nm. The width W₁corresponds approximately to the channel width W of the transistor 101.The width W2 is about 5 nm. The width W₃ is about 10 nm. Thus, in oneexample the total channel width W of the transistor 201 is:W=W ₁+2W ₂=2W ₃=100 nm+2(5 nm)+2(10 nm)=130 nm.Thus, the transistor 201 can result in a large increase in channel widthW over the conventional planar transistor 101 of FIGS. 1A-1C. Theincrease in channel width W corresponds to an increase in the draincurrent ID. Because the channel width W has been increased withoutconsuming an increased area of semiconductor substrate, the currentfootprint of the transistor 201 is increased with respect to thetransistor 101 of FIGS. 1A-1C

Furthermore, it is possible to obtain the benefit of using the firstlayer of semiconductor material 204 as a back gate for the transistor201. Because the BOX layer 206 and the second layer of semiconductormaterial 208 are very thin, a voltage can be applied to the first layerof semiconductor material 204 to influence the channel region 216 of thetransistor 201. In this way, the threshold voltage V_(th) of thetransistor 201 can be tuned by application of a selected voltage to thefirst layer of semiconductor material 204.

While FIGS. 2A-2Y and the related description have disclosed anintegrated circuit die 200 implementing SOI technology, such descriptionhas been given only by way of example. Those of skill in the art willrecognize, in light of the present disclosure, that principles of thepresent disclosure can be applied to semiconductor technologies otherthan SOI substrates without departing from the scope of the presentdisclosure. All such other applications fall within the scope of thepresent disclosure.

FIGS. 3A-3G illustrate a process for forming an integrated circuit die300 including a transistor 301 having an increased channel width W ascompared to the channel width W of the transistor 101 of FIGS. 1A-1C andother conventional transistor structures.

FIG. 3A is a cross-section of the integrated circuit die 300 at anintermediate stage of processing. The integrated circuit die 300includes an FDSOI substrate 302. The FDSOI substrate 302 includes afirst layer of semiconductor material 304, a BOX layer 306 positioneddirectly on the first layer of semiconductor material 304, and a secondlayer of semiconductor material 308 positioned directly on the BOX layer306. A pad oxide 332 is positioned on the second layer of semiconductormaterial 308. A layer of silicon nitride 334 is positioned on the padoxide layer 332. Trench isolation regions 328 have previously beenformed in the integrated circuit die 300. A dielectric liner 330 ispositioned between the trench isolation region 328 and the FDSOIsubstrate 302. The materials for the trench isolation region 328 and theliner 330 are selected so that the material in the trench isolationregion 328 can be selectively etched with respect to the material of theliner 330.

In one embodiment, the first layer of semiconductor material 304 ismonocrystalline silicon between 10 and 30 nm thick. The BOX layer 306 issilicon dioxide between 10 and 25 nm thick. The second layer ofsemiconductor material 308 is monocrystalline silicon between 5 and 8 nmthick. Alternatively, other semiconductor materials and dielectricmaterials can be used for the first and second layers of semiconductormaterial 304, 308 and the BOX layer 306. The pad oxide layer 332 isbetween 1 and 3 nm thick. In one embodiment, the material of the shallowtrench isolation region 328 is silicon dioxide and the material of theliner 330 is silicon nitride.

In FIG. 3B, the trench isolation region 328 and the liner 330 have beenetched back to the BOX layer 306. This can be accomplished by firstetching the material in the trench isolation region 328 to a positionabove the bottom of the BOX layer 306 and subsequently etching the liner330 to the same position by using either a wet etch or a dry etch.

In FIG. 3C, the trench isolation region 328 has been refilled withdielectric material such as silicon dioxide. A chemical mechanicalplanarization process is then performed to planarize the top surface ofthe integrated circuit die 300, leaving the structure shown in FIG. 3C.

In FIG. 3D the silicon nitride layer 334 and the pad oxide layer 332have been removed in successive etch steps. The trench isolation region328 has also been recessed back to the BOX 306. During removal of thepad oxide 332, a very high concentration of HF is used to fully exposethe sidewalls of the second layer of semiconductor material 308.

In FIG. 3E a high K gate dielectric 318 has been formed on the top andsidewalls in the second layer of semiconductor material 308. A thinlayer 320 has been formed directly on the gate dielectric 318. A layerof polysilicon 322 has been formed on the layer 320. A silicon nitridehard mask 326 has been formed on the polysilicon 322.

FIG. 3E illustrates a larger channel width W of the transistor 301. Inone example, the width W1 is about 100 nm. The width W1 may be similarto the entire channel width W of the transistor 101. The width W2 of thetransistor 301 is about 5 nm. Thus, in one example, the total channelwidth W of the transistor 301 is:W=W ₁2W ₂=100 nm+2(5 nm)=110 nm.Thus, the transistor 301 can result in an increase in channel width ofabout 10% over the conventional planar transistor 101 of FIGS. 1A-1C.

FIG. 3F is a cross-section of the integrated circuit die 300 taken alongcross-section lines 3F as seen in FIG. 3G. The high K gate dielectric318 is positioned directly on the second layer of semiconductor material308. The channel region 316 is positioned in the second layer ofsemiconductor material 308 directly below the gate dielectric 318. Thelength L of the channel 316 corresponds to the portion of the secondlayer of semiconductor material 308 in direct contact with the gatedielectric 318. The gate structure 314 further includes the metal gate320 in direct contact with the gate dielectric 318.

In one embodiment, the gate dielectric 318 is a high K gate dielectrichaving a thickness between 1 and 2 nm. The gate dielectric 318 caninclude one or more of hafnium, zirconium, oxide of those materials, orother suitable materials for a high K gate dielectric. The gatedielectric can be deposited by CVD, physical vapor deposition (PVD), orany other suitable process for forming a high K gate dielectric. Thethickness of the gate dielectric 318 can be selected to achieve aparticular value of the threshold voltage V_(th) of the transistor 301.

In one embodiment, the layer 320 includes one or more of titanium,tungsten, tantalum, and nitrides of those materials. The layer 320 canbe deposited by CVD or PVD. The space between portions of the layer 320is filled with a conductive material 322. In one embodiment, theconductive material 322 is polysilicon.

The conductive plugs 362, 364 are formed by etching vias in theinterlevel dielectric material 360 and then filling the vias with aconductive material. In one embodiment, the conductive plugs 362, 364are made from tungsten. Alternatively, other suitable conductivematerials can be selected for the plugs 362, 364.

FIG. 3G is a top view of the integrated circuit die 300. The top view ofFIG. 3G illustrates the positions of the contact plugs 362, 364 inrelation to the gate structure 314. Only the silicon nitride cap layer226 is visible on the gate structure 314 in the top view of FIG. 3G.

One embodiment of the present disclosure is directed to an integratedcircuit that includes a first layer of semiconductor material, a gatedielectric of a transistor positioned on a top surface and on a sidesurface of the first layer of semiconductor material. The gatedielectric may be directly on the first layer of semiconductor material.A gate electrode of the transistor is positioned on the gate dielectricon the top and side surfaces of the first layer of semiconductormaterial. A source region of the transistor is formed in a second layerof semiconductor material and a drain region of the transistor is formedin the second layer of semiconductor material. The second layer ofsemiconductor material is on the first layer of semiconductor material.

Another embodiment is directed to a device that includes a substrate, afirst layer of semiconductor material on the substrate, the first layerhaving a top surface, side surfaces, and a bottom surface, a first and asecond recess between portions of the bottom surface of the first layerof semiconductor material and the substrate, and a gate structure on thefirst layer of semiconductor material and in the first and secondrecesses, the gate structure configured to interact with the topsurface, the side surfaces, and the portions of the bottom surface ofthe first layer of semiconductor material.

The various embodiments described above can be combined to providefurther embodiments. Aspects of the embodiments can be modified, ifnecessary to employ concepts of the various patents, applications andpublications to provide yet further embodiments.

These and other changes can be made to the embodiments in light of theabove-detailed description. In general, in the following claims, theterms used should not be construed to limit the claims to the specificembodiments disclosed in the specification and the claims, but should beconstrued to include all possible embodiments along with the full scopeof equivalents to which such claims are entitled. Accordingly, theclaims are not limited by the disclosure.

The invention claimed is:
 1. An integrated circuit die, comprising: afirst layer of semiconductor material; a first layer of dielectricmaterial positioned on the first layer of semiconductor material; asecond layer of semiconductor material positioned on the first layer ofdielectric material, the second layer having a top surface, sidesurfaces, and a bottom surface, a central portion of the bottom surfacebeing supported by the first layer of dielectric material, an exteriorportion of the bottom surface being spaced from a top surface of thefirst layer of dielectric material by a distance; and a transistorincluding: a channel region in the second layer of semiconductormaterial; a gate dielectric positioned on the top surface, the sidesurfaces, and on the portion of the bottom surface of the second layerof semiconductor material; and a gate electrode positioned on the gatedielectric on the top surface, the side surfaces, and on the portion ofthe bottom surface of the second layer of semiconductor material.
 2. Theintegrated circuit die of claim 1, comprising a recess in the firstlayer of dielectric material below the portion of the bottom surface ofthe second layer of semiconductor material, the gate dielectric beingpositioned on all surfaces of the recess.
 3. The integrated circuit dieof claim 2 wherein the gate electrode includes a portion that extendsinto the recess and is on the gate dielectric below the bottom surfaceof the second layer of semiconductor material.
 4. The integrated circuitdie of claim 3 wherein a total channel width of the transistor includesa height of the second layer of semiconductor material, a width of thetop surface, and a width of the portion of the bottom surface above therecess.
 5. The integrated circuit die of claim 1 wherein the gatedielectric is further positioned on a portion of the first layer ofdielectric material that is below the portion of the bottom surface. 6.The integrated circuit die of claim 1 wherein the transistor comprises asource region and a drain region positioned on the second layer ofsemiconductor material.
 7. The integrated circuit die of claim 1 whereinthe second layer of semiconductor material has a height less than 10 nm.8. The integrated circuit die of claim 1 wherein the gate dielectric isa high K gate dielectric including hafnium or zirconium.
 9. Theintegrated circuit die of claim 1, wherein the first layer ofsemiconductor material is a back gate.
 10. An integrated circuit die,comprising: a transistor structure that includes: a dielectric layerhaving a surface with a central area and an outer area; a first layer ofsemiconductor material, the first layer of semiconductor materialincluding a top surface, side surfaces, and a bottom surface, a firstportion of the bottom surface being on the central area of the surfaceof the dielectric layer and a second portion of the bottom surface beingspaced from the outer area by a distance; a gate dielectric positionedon the top surface, on the second portion of the bottom surface, and onthe side surfaces of the first layer of semiconductor material; a gateelectrode positioned on the gate dielectric on the top surface, on theportion of the bottom surface, and on the side surfaces of the firstlayer of semiconductor material, a portion of the gate electrode beingbetween the dielectric layer and the second portion of the bottomsurface of the first layer of semiconductor material; a source region ofthe transistor is adjacent to the gate electrode; and a drain region ofthe transistor is adjacent to the gate electrode.
 11. The integratedcircuit die of claim 10, comprising a first layer of dielectricmaterial, the first layer of semiconductor material being positioneddirectly on the first layer of dielectric material.
 12. The integratedcircuit die of claim 11 wherein the first layer of dielectric materialis recessed from the portion of the bottom surface of the first layer ofsemiconductor material.
 13. The integrated circuit die of claim 10wherein the top surface of the first layer of semiconductor material hasa first width, each of the side surfaces has a first height, and theportion of the bottom surface has a second width.
 14. The integratedcircuit die of claim 13 wherein a total width of a channel formed in thefirst layer of semiconductor material including the first width, thefirst height for a first one of the sides, the first height for a secondone of the sides, and the second width.
 15. A device, comprising: aburied oxide layer having a surface where the surface has a firstportion and a second portion; a first semiconductor region having acentral portion and outer portions, the central portion being on thesecond portion of the buried oxide layer, the first portion of theburied oxide layer being separated from the outer portions of the firstsemiconductor region by a first space; and a gate electrode positionedon the first semiconductor region, on the buried oxide layer, and in thefirst space.
 16. The device of claim 15, further comprising a gatedielectric between the gate electrode and the first semiconductorregion.
 17. The device of claim 15 wherein the gate electrode includes aliner formed on the first semiconductor region, the buried oxide layer,and in the first space and a conductive material formed on the liner.18. The device of claim 17 wherein a portion of the conductive materialis in the space between a first portion of the liner and a secondportion of the liner.
 19. The device of claim 15 wherein the firstsemiconductor region includes a top surface, side surfaces, and a bottomsurface and the gate electrode is on the top surface, the side surfaces,and a portion of the bottom surface.
 20. The device of claim 15 whereina second portion of the buried oxide layer is separated from the firstsemiconductor region by a second space, the gate electrode beingpositioned in the second space.